Silicon 45° micromirrors fabricated by etching in alkaline solutions with organic additives
نویسندگان
چکیده
منابع مشابه
Alkaline Etching of Silicon
Alkaline etching of crystalline using KOH (potassium hydroxide), TMAH (tetramethyl ammonium hydroxide), or EDP (ethylenediamene pyrocatecol) is performed for creating various feature definition in MEMS (micro electrical mechanical structures, solar cells, and integrated circuit manufacturing. KOH will be discussed in this section. The alkaline chemistries have the ability to preferentially etch...
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The anisotropic etching behavior of single-crystal silicon and the behavior of SiO2 and Si3N4 in an ethylenediaminebased solution as well as in aqueous KOH, NaOH, and LiOH were studied. The crystal planes bounding the etch front and their etch rates were determined as a function of temperature, crystal orientation, and etchant composition. A correlation was found between the etch rates and thei...
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14 The development and status of what is commonly called the Gerischer mechanism of silicon etching in 15 fluoride solutions is reviewed. The two most widely used and studied wet etchants of silicon are F 16 and OH . Their mechanisms of atom removal share many things in common; in particular, chemical pas17 sivation by a hydrogen-terminated surface plays an important role in both. Crucially, ho...
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We have developed a novel wafer-scale single-crystalline silicon micromirror bonding process to fabricate optically flat micromirrors on polysilicon surface-micromachined 2D scanners. The electrostatically actuated 2D scanner has a mirror area of 450 jtm x 450 tm and an optical scan angle of Compared to micromirrors made with a standard polysilicon surface-micromachining process, the radius of ...
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Nano-porous silicon were simply prepared from p-type single crystalline silicon wafer by electrochemical etching technique via exerting constant current density in two different HF-Ethanol and HF-Ethanol-H2O solutions. The mesoporous silicon layers were characterized by field emission scanning electron microscopy and scanning electron microscopy. The results demonstrate that the width of nano-p...
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ژورنال
عنوان ژورنال: Microsystem Technologies
سال: 2013
ISSN: 0946-7076,1432-1858
DOI: 10.1007/s00542-013-1859-z